- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/147 - Arrangements for directing or deflecting the discharge along a desired path
Patent holdings for IPC class H01J 37/147
Total number of patents in this class: 1181
10-year publication summary
|
118
|
86
|
88
|
95
|
136
|
127
|
116
|
101
|
130
|
41
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Tech Corporation | 4424 |
132 |
| ASML Netherlands B.V. | 6816 |
130 |
| NuFlare Technology, Inc. | 770 |
97 |
| Hitachi High-Technologies Corporation | 2034 |
71 |
| FEI Company | 851 |
45 |
| Axcelis Technologies, Inc. | 429 |
40 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 149 |
39 |
| Applied Materials, Inc. | 16587 |
36 |
| Carl Zeiss Microscopy GmbH | 1146 |
36 |
| JEOL Ltd. | 556 |
36 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
35 |
| Applied Materials Israel, Ltd. | 549 |
26 |
| Carl Zeiss MultiSEM GmbH | 85 |
24 |
| KLA-Tencor Corporation | 2574 |
22 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
17 |
| Exogenesis Corporation | 77 |
16 |
| Hitachi, Ltd. | 16452 |
14 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
13 |
| Ebara Corporation | 1951 |
13 |
| KLA Corporation | 1223 |
12 |
| Other owners | 327 |